U. Rembold — новинки
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S. Fatikow, U. Rembold, Ulrich Rembold Microsystem Technology and ...
ISBN: 3540606580 Язык: Русский Аннотация
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and